uEtch

The uEtch is a single-wafer system specifically designed for university and small research laboratories.

Key Benefits

• Fully integrated, compact system includes built-in HF gas cabinet
• PLC controlled with multi-user features and extensive safety interlocks
• Can process single whole wafers (100-200mm) or die on a carrier
• HF vapour processes are transferable to SPTS 3- and 25-wafer production systems, offering a path from concept to production